Influence of annealing processing on of nanoparticle size on surface of CZO films
کد مقاله : 1129-PHYCHEM23
نویسندگان
نسیم رحیمی *
گروه علوم پایه. گروه فیزیک .دانشگاه ملایر .شهر ملایر
چکیده مقاله
The CZO films were deposited for 75min on glass substrates using RF magnetron co-sputtering at room temperature. The wide variation in the surface morphology and grain sizes reveal the importance of the temperature in the synthesis of these film samples. RMS roughness of CZO films in as deposited films were 4.18nm and in 400ºC was 2.87nm and 500ºC, 600ºC were 4.48, 6.02nm, respectively.
کلیدواژه ها
nanoparticle size; Atomic Force Microscopy; Zinc oxide; RMS roughness.
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